Multilayered Cr(Al)N/SiOx Nanocomposite Coatings Fabricated by Differential Pumping Cosputtering
نویسندگان
چکیده
Nanocomposite films of metal nitrides such as TiN/Si3N4, TiN/BN, and CrN/AlN have attracted substantial attention as coating materials for improving hardness and saving rare metals. It is difficult to prepare composite films consisting of nitride and oxide by conventional reactive sputtering methods. Nose et al. developed a differential pumping cosputtering (DPCS) system, which can fabricate different nanocomposite films [1]. To elucidate the process and mechanism of film growth in the DPCS system, we prepared a hard coating Cr(Al)N/SiOx nanocomposite layer on the under buffer layers that were grown on a Si substrate and have been examining by means of analytical electron microscopy.
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